Array substrate and manufacturing method thereof

US11997878B2 · kind B2 · utility

Assignee

• WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.

Inventors

• Huihui Zhao · Hubei, CN
• Changbum Park · Hubei, CN

Key dates

• Filing date: Sep 8, 2020
• Grant date: May 28, 2024
• Expiry date: Jun 19, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K59/123

Abstract

An array substrate and a manufacturing method thereof are provided. The array substrate includes a substrate and a first recess. The first recess sequentially extends through a second dielectric layer, a third insulating layer, a first dielectric layer, a second insulating layer, a first insulating layer, an active layer, and a portion of a barrier layer. A bottom surface of the first recess is formed inside the barrier layer.