Computer-implemented method for automatically producing metrology test plan

US12000694B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Thomas Guth · Endicott, US
• Annett Froewis · Oberkochen, DE
• Birgit Huber · Bad Säckingen, DE
• Günter Haas · Aalen, DE
• Ana Carolina Mayr Adam · Aalen, DE

Key dates

• Filing date: Mar 15, 2021
• Grant date: Jun 4, 2024
• Expiry date: Nov 9, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B19/4097
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A computer-implemented method automatically produces a test plan for measuring a measured object. The method includes obtaining a desired dataset of the measured object. The method includes providing a starting pattern. The providing comprises producing a division. The producing the division comprises applying at least one division function. The division has a plurality of division indices. The method includes producing a target pattern by generating a comparison between the desired dataset and the division. At least one division index is adapted in response to a deviation of the division from the desired dataset. The method includes creating at least one element with at least one piece of pattern information in the test plan in accordance with the target pattern.