Resonant microelectromechanical sensor with improved operation
US12000859B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2022 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | Sep 6, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0882
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, an element that measures a force including at least one resonator of resonant frequency ωrn, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa<ωd<ωrn, the decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.