Patent · US Active

Low temperature low-abundance atomic object dispenser

US12002597B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 2, 2021
Grant dateJun 4, 2024
Priority date
Expiry dateAug 24, 2042

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45544
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods and dispensers for dispensing atomic objects are provided. An example method for dispensing atomic objects includes sealing a reaction component at least partially coated with a composition comprising the atomic objects inside an oven; and, with the oven disposed within a pressure-controlled chamber, heating the composition to an atomizing reaction temperature to cause an atomizing chemical reaction to occur. The reaction component comprises a material that is a participant in the reaction. A result of the reaction is elemental atomic objects deposited on a depositing surface within the oven. The atomizing reaction temperature is greater than a dispensing threshold temperature. The method further comprises allowing the oven to cool below the dispensing threshold temperature; and heating the oven to a dispensing temperature to cause the elemental atomic objects to be dispensed from the oven through a dispensing aperture. The dispensing temperature does not exceed the dispensing threshold temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.