Patent · US Active

Apparatus and methods for reduced neutral contamination in a mass spectrometer

US12002672B2 · kind B2 · utility

0Cited by
3References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 29, 2018
Grant dateJun 4, 2024
Priority date
Expiry dateJun 29, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J49/426
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Apparatus and methods for controlling contamination of components contained within the high-vacuum chambers of mass spectrometer systems are provided. The apparatus and methods employ a beam of neutral gas injected in a contra-flow configuration to incoming particle stream from the ionization chamber. The contra-flow can be in the directly opposite counter-flow direction (e.g., 180 degrees) or at a cross-flow angle to the incoming ion stream (e.g., flowing at an angle between about 10 degrees and 170 degrees). The contra-flow disrupts the axial gas flow and diverts neutral molecules and other undesirable contaminants before they reach the high vacuum stages (e.g., beyond the IQ0 orifice) of the spectrometer. By reducing the transmission of contaminants into the sensitive components housed deep within the mass spectrometer, the present invention can increase throughput, improve robustness, and/or decrease the downtime typically required to vent/disassemble/clean the fouled components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.