Radio frequency devices with photo-imageable polymers and related methods
US12002866B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2021 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | Jun 9, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
RF devices, and more particularly RF devices with photo-imagable polymers for high frequency enhancements and related methods are disclosed. High frequency enhancements are realized by providing air cavities registered with one or more operating portions of RF devices. The air cavities are formed by photo-imagable polymer structures that provide separation from high dielectric constant materials associated with sealing materials, such as overmold materials, that are typically used for environmental and/or mechanical protection in RF devices. Related methods are disclosed that include forming the photo-imagable polymer structures and corresponding air cavities through various lamination and patterning of photo-imagable polymer layers. Further radiation hardening steps are disclosed that may be applied to the photo-imagable polymer structures after air cavities are formed to promote improved structural integrity of the air cavities during subsequent fabrication steps and during operation of the RF devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.