Apparatus and method for manufacturing a display device
US12004413B1 · kind B1 · utility
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2References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2023 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | Oct 2, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of manufacturing a display device includes arranging a display substrate in a chamber, arranging a mask assembly in the chamber, and supplying a deposition material to the mask assembly by a deposition source. The arranging of the mask assembly includes disposing a stopping layer including a stopping layer opening on a first mask layer, disposing an inorganic layer on the stopping layer, forming a first mask opening in the first mask layer, and forming an inorganic opening of the inorganic layer by etching the inorganic layer corresponding to the stopping layer opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.