Micro-pump fluidic strategy for fabricating perovskite microwire array-based devices on semiconductor platforms and method
US12005445B2 · kind B2 · utility
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Key dates
| Filing date | May 18, 2021 |
| Grant date | Jun 11, 2024 |
| Priority date | — |
| Expiry date | May 8, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0197
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for making ion-crystal semiconductor material based micro- and/or nanowires, MNWs, embedded into a semiconductor substrate, includes forming a structure into the semiconductor substrate, wherein the structure has each of a width and a depth less than 10 μm; pumping an ion-crystal semiconductor material as an ion solution into the structure, wherein the pumping is achieved exclusively due to capillary forces; flowing the ion solution through the structure to fill the structure; crystallizing the ion-crystal semiconductor material inside the structure to form the MNWs; and adding electrodes to ends of the MNWs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.