Patent · US Active

Baw resonator with improved top electrode connection

US12009802B2 · kind B2 · utility

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0References

11Claims

0Family size

Assignee

RF360 Singapore Pte. Ltd. · SG

Inventors

Maximilian SCHIEK · Puchheim, DE
Willi AIGNER · Moosinning, DE

Key dates

Filing date	Jul 1, 2019
Grant date	Jun 11, 2024
Priority date	—
Expiry date	Nov 4, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2003/025
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A BAW resonator comprises a bottom electrode, a piezoelectric layer and a top electrode. A top electrode connection is arranged in a plane above the top electrode. For doing this a spacer is arranged on the top electrode. A capping layer is sitting on the spacer distant from the top electrode such that an air-filled gap to the top electrode is kept. The top electrode connection can now be arranged above the capping layer. An electrically conductive path connects the top electrode and the top electrode connection. Such a resonator needs only one lateral design and can provide a low-ohmic interconnection of resonators e.g. in a filter circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.