MEMS accelerometer
US12013414B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2022 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Sep 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS accelerometer includes a base, proof mass, at least one pair of seesaw structures, and an out-of-plane displacement detection component. The at least one pair of the seesaw structures are oppositely disposed and fixed on the base through anchor points, and the out-of-plane displacement detection component is configured to detect rotation of the at least one pair of the seesaw structures or out-of-plane linear motion of the proof mass. Linear displacement of the MEMS accelerometer is not only beneficial to improve linearity of a capacitive displacement detection, but also to other non-capacitive detection methods, such as optical displacement detection. In addition, a double coupling structure is adopted to jointly couple rotation of seesaws, and remaining translational and rotational modes of the seesaw structures are suppressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.