Method of providing a MEMS device comprising a pyramidal protrusion, and a mold
US12013415B2 · kind B2 · utility
0Cited by
1References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 7, 2020 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Apr 7, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of providing a MEMS device, such as an AFM probe, having a three-sided pyramidal protrusion is made using a multitude of MEMS method steps. To allow the reliable and speedy manufacture of such a MEMS device having a three-sided protrusion on a massive scale, wherein the protrusion has a relatively small half-cone angle and a single apex, a mold is used. The mold includes a sacrificial layer on top of a base substrate. The method of providing the MEMS device includes:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.