MEMS scanner for detecting rotational angle of mirror
US12013492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2018 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Jan 15, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS scanner is disclosed. The MEMS scanner includes a mirror rotatable about at least one rotational axis, a gimbal disposed outside the mirror, a spring connected to the gimbal on the same line as the rotational axis of the mirror, a substrate spaced apart from an outer surface of the gimbal and connected to the gimbal via the spring, a coil disposed on the gimbal so as to adjust a rotational angle of the mirror by generating electromagnetic force by interaction with a magnetic field, which is first formed therearound, when current flows therethrough, and a plurality of combs formed between the substrate and at least one of the spring and the gimbal adjacent to the substrate so as to detect the rotational angle of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.