Method and system for lot-tool assignment
US12013688B2 · kind B2 · utility
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15References
20Claims
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Key dates
| Filing date | Dec 6, 2020 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Jan 10, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.