Tailoring of high power VCSEL arrays
US12015245B2 · kind B2 · utility
1Cited by
7References
20Claims
0Family size
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Key dates
| Filing date | Feb 15, 2023 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Feb 15, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/18
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Modification of the topology of selected regions of individual VCSEL devices during fabrication is utilized to provide an array output beam with specific characteristics (e.g., “uniform” output power across the array). These physical features include at least the width of the metal aperture, the width of the oxide aperture, and/or the geometry of the contact ring structure on the top of the VCSEL device. The modifications may also function to adjust the numerical apertures (NAs) of the devices, the beam waist, wallplug efficiency, and the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.