Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US12015393B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2022 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Jun 20, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/13
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a substrate having a surface and a piezoelectric plate having front and back surfaces. The back surface of the piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. One or more diaphragm support pedestals extend between the substrate and the diaphragm within the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.