Apparatus for aligning device having fine pitch and method therefor
US12019116B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2020 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Apr 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for aligning a device includes: loading devices sequentially on an upper surface of a base plate having vacuum holes; suctioning the loaded device with vacuum pressure that allows minute movement of the loaded device, as the vacuum pressure is applied while the device is loaded on the base plate; moving an alignment vision assembly positioned above the base plate to the upper portion of the device to be aligned and then lowering the alignment vision assembly; checking a position of the device with a vision means through a through hole and an opening in a state, in which an alignment block surrounds the device, so as to inform a controller of the coordinates of the device; and aligning the device by finely moving the base plate in X-Y-θ directions according to the coordinates so that the device is guided to two surfaces of the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.