Source-detector synchronization in multiplexed secondary ion mass spectrometry
US12020920B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2021 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Jul 2, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure features methods and systems that include directing an ion beam to a region of a sample to liberate charged particles from the region of the sample, where the directed ion beam is pulsed at a first repetition rate, deflecting a first subset of the liberated charged particles from a first path to a second path different from the first path in response to a gate signal synchronized with the repetition rate of the pulsed ion beam, and detecting the first subset of the liberated charged particles in a time-of-flight (TOF) mass spectrometer to determine information about the sample, where the gate signal sets a common reference time for the TOF mass spectrometer for the first subset of charged particles liberated by each pulse of the ion beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.