Patent · US Active

Circular wafer lateral positioning device

US12020974B2 · kind B2 · utility

0Cited by

4References

4Claims

0Family size

Assignee

Core Flow Ltd. · IL

Inventors

Alon Segal · San Francisco, US
Daniel Yahides · Kiryat Motzkin, IL
Yaacov Legerbaum · Haifa, IL

Key dates

Filing date	Mar 11, 2020
Grant date	Jun 25, 2024
Priority date	—
Expiry date	Oct 13, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68764
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A wafer positioning device includes at least one fixed stop that is positioned at a periphery of a clamped position on a surface of a chuck and an extendible finger. A finger extension mechanism extends the finger outward toward a center of the chuck surface, and retracts the finger away from the center of the chuck surface. The finger is configured, when a wafer is placed on the chuck surface and the finger extension mechanism is operated to extend the finger outward, to push the wafer laterally toward the fixed stop until an edge of the wafer contacts the fixed stop when a distal end of the finger is at the periphery of the clamped position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.