Power alarm and fire loading risk reduction for a deposition tool
US12020994B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 11, 2021 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Jan 4, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A deposition tool includes a power cable pedestal including a pedestal body with a first surface and a second surface and a guide hole that extends through the pedestal body from the first surface to the second surface, where at least a portion of a sidewall of the guide hole has a slanted surface, and where the pedestal body is formed from a first material with a melting point that is higher than a melting point of Polyoxymethylene (POM). The deposition tool includes a bushing arranged over the guide hole, where the bushing is formed from a second material with a melting point that is higher than the melting point of POM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.