Transversely-excited film bulk acoustic resonator with multi-mark electrodes and optimized electrode thickness
US12021502B2 · kind B2 · utility
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Key dates
| Filing date | Dec 28, 2021 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Feb 20, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including a multi-mark interdigital transducer (IDT), with fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.