Method for continuously generating silicon monoxide gas
US12024437B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 28, 2021 |
| Grant date | Jul 2, 2024 |
| Priority date | — |
| Expiry date | Dec 28, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B2210/0009
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
In a method for continuously generating silicon monoxide (SiO) gas, wherein a silicon monoxide gas-generating raw material in a raw material supply unit is continuously charged into a reaction chamber RM, an inert gas is flowed through the raw material supply unit so as to be directed toward the charging direction of the silicon monoxide gas-generating raw material. The method for continuously generating silicon monoxide gas prevents a decrease in yield of the silicon monoxide (SiO) gas-generating raw material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.