Method for optical monitoring and/or determination of properties of sample

US12025562B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Peter Hartmann · Darmstadt, DE
• Tobias Baselt · Dresden, DE
• Wulf Grählert · Dresden, DE
• Oliver Throl · Dresden, DE
• Philipp Wollmann · Dresden, DE

Key dates

• Filing date: Jun 29, 2022
• Grant date: Jul 2, 2024
• Expiry date: Jun 29, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/129
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In the method for optical monitoring and/or determination of properties on samples, monochromatic electromagnetic radiation with a predetermined wavelength is sequentially directed from several radiation sources onto a sample influenced by an electronic evaluation unit. The respective intensity specific to the wavelength of the electromagnetic radiation scattered and/or reflected by the sample is detected by at least one detector and fed to the electronic evaluation unit for spectrally resolved evaluation in order to use it to monitor and/or determine properties of the respective sample.