Gradient raised frames n film bulk acoustic resonators
US12028041B2 · kind B2 · utility
3Cited by
2References
17Claims
0Family size
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Key dates
| Filing date | Sep 11, 2020 |
| Grant date | Jul 2, 2024 |
| Priority date | — |
| Expiry date | Apr 7, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Gradient raised frames in film bulk acoustic resonators. In some embodiments, a film bulk acoustic resonator device can include a substrate, first and second metal layers implemented over the substrate, a piezoelectric layer between the first and second metal layers, and a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.