Ultrasonic transducer unit and manufacturing method thereof
US12030084B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2020 |
| Grant date | Jul 9, 2024 |
| Priority date | — |
| Expiry date | Dec 13, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/51
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides an ultrasonic transducer unit and a manufacturing method thereof. The ultrasonic transducer unit includes a substrate, a first electrode arranged on the substrate, an insulating layer arranged on the first electrode, a vibrating film arranged on the insulating layer, a closed cavity being between the vibrating film and the insulating layer, and a second electrode arranged on the vibrating film. The vibrating film is made of a photoresist. The ultrasonic transducer unit disclosed by the present disclosure adopts the photoresist as a material of the insulating layer and/or the vibrating film, so that the ultrasonic transducer unit with better performance can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.