Patent · US Active

Micromechanical system, method for operating a micromechanical system

US12031820B2 · kind B2 · utility

0Cited by

2References

15Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Lars Tebje · Reutlingen, DE
Johannes Classen · Reutlingen, DE
Christof Schwenk · Glatten, DE
Holger Rumpf · Reutlingen, DE
Joerg Braeuer · Nehren, DE
Torsten Ohms · Lambach, DE

Key dates

Filing date	Aug 4, 2021
Grant date	Jul 9, 2024
Priority date	—
Expiry date	Aug 4, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0882
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.