Patent · US Active

Co-deposition of cesium telluride photocathode and X-ray fluorescence controller co-deposition of cesium telluride photocathode

US12033846B2 · kind B2 · utility

0Cited by
2References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 15, 2020
Grant dateJul 9, 2024
Priority date
Expiry dateOct 25, 2041

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C14/548
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

One or more embodiments relates to a system and method for growing ultrasmooth and high quantum efficiency photocathodes. The method includes exposing a substrate of Si wafer to an alkali source; controlling co-evaporating growth and co-deposition forming a growth including Te; and monitoring a stoichiometry of the growth, forming the photocathodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.