System and method for synchronized stage movement
US12038375B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 2022 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Sep 7, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An embodiment of a microscope system is described that comprises a sample stage configured to position a sample; and a spectrometer comprising an interferometer configure to provide a light beam to the sample stage and one or more detectors configured to detect light spectra in response to the light beam, wherein the spectrometer sends a notification to the sample stage after a scan comprising an acceptable measure of quality has been acquired from the detected light spectra at a first location, and the sample stage is further configured to count the notifications and initiate movement of the sample stage to a second location when a count value reaches a pre-determined number.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.