Wave guide sensor

US12038605B2 · kind B2 · utility

Assignees

• UNIVERSITE CLAUDE BERNAD LYON 1 · FR
• CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
• INSTITUT NATIONAL DES SCIENCES APPLIQUÉES DE LYON · FR
• STMicroelectronics (Crolles 2) SAS · FR

Inventors

• Michele Calvo · L'Essart Mador, FR
• Stephane Monfray · Eybens, FR
• Paul Charette · Barcelona, ES
• Guillaume Beaudin · Sherbrooke, CA
• Regis Orobtchouk · Le Pont-de-Beauvoisin, FR

Key dates

• Filing date: Oct 28, 2021
• Grant date: Jul 16, 2024
• Expiry date: Jun 1, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12138
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An embodiment sensor includes a hybrid waveguide. The hybrid waveguide includes a first dielectric optical waveguide lying on and in contact with a dielectric support layer; a first surface waveguide optically coupled to the first dielectric optical waveguide, parallel to the first dielectric optical waveguide, and lying on the dielectric support layer. The first surface waveguide has a lateral surface configured to guide a surface mode. The hybrid waveguide includes a cavity intended to be filled with a dielectric fluid, separating laterally the first dielectric optical waveguide from the lateral surface of the first surface waveguide.