Arrangement and method for detecting a measured value on the basis of electron holography

US12038720B2 · kind B2 · utility

Assignee

• TECHNISCHE UNIVERSITÄT BERLIN · DE

Inventors

• Tolga WAGNER · Berlin, DE
• Michael Lehmann · Mount Vernon, US
• Tore Niermann · Berlin, DE

Key dates

• Filing date: Jun 28, 2019
• Grant date: Jul 16, 2024
• Expiry date: May 23, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/266
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to a method for detecting a measured value (dϕ/dx, M). According to the invention, provision is made for a sinusoidal excitation signal (Ue) with a predetermined excitation frequency (f), with or without a superposed DC component (Uoffset), to be fed to an input of a component (100, C), for at least one electron holography measuring step to be carried out, in which an electron beam (Se) is directed on the component (100, C), said electron-beam penetrating and/or passing the component (100, C) and subsequently being superposed with a reference electron-beam (Sr), and for an electrical hologram (EHG) arising by interference of the two electron beams (Se, Sr) during a predetermined measurement window (F) to be measured and the phase image (PB) to be ascertained therefrom, and for the measured value (M) to be formed on the basis of the phase image (PB), wherein the temporal length (Tf) of the measurement window (F) of the electron holography measuring step is shorter than half the period (T) of the sinusoidal excitation signal (Uc).