Power device and method of manufacturing the same
US12040391B2 · kind B2 · utility
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2References
13Claims
0Family size
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Key dates
| Filing date | Aug 10, 2021 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Sep 24, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/343
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided are a power device and a method of manufacturing the same. The power device may include a channel layer; a source and a drain at respective sides of the channel layer; a gate on the channel layer between the source and the drain; a passivation layer covering the source, the drain, and the gate; and a plurality of field plates in the passivation layer. The plurality of field plates may have different thicknesses. The plurality of field plates may have different widths, different pattern shapes, or both different widths and different pattern shapes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.