Patent · US Active

Site-selective piezoelectric-layer trimming

US12040774B2 · kind B2 · utility

0Cited by

1References

25Claims

0Family size

Assignee

RF360 Singapore Pte. Ltd. · SG

Inventors

Philipp Geselbracht · Haar, DE
Johannes Koerber · Munich, DE
Manuel Sabbagh · Dorfen, DE
Peter Schmidt · San Jose, US

Key dates

Filing date	Mar 29, 2021
Grant date	Jul 16, 2024
Priority date	—
Expiry date	May 7, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/082
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

An apparatus is disclosed for site-selective piezoelectric-layer trimming. The apparatus includes at least one surface-acoustic-wave filter with an electrode structure and a piezoelectric layer. The electrode structure has multiple gaps. The piezoelectric layer has a planar surface defined by a first (X) axis and a second (Y) axis that is perpendicular to the first (X) axis. The piezoelectric layer is configured to propagate an acoustic wave along the first (X) axis. The piezoelectric layer includes a first portion that supports the electrode structure and a second portion that is exposed by the multiple gaps of the electrode structure. The second portion has different heights across the second (Y) axis. The different heights are defined with respect to a third (Z) axis that is substantially normal to the planar surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.