Patent · US Active

Transversely-excited film bulk acoustic resonator package

US12040781B2 · kind B2 · utility

0Cited by
75References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 9, 2021
Grant dateJul 16, 2024
Priority date
Expiry dateOct 9, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H2003/023
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

Acoustic resonator devices and filters are disclosed. An acoustic resonator chip includes a piezoelectric plate attached to a substrate. Portions of the piezoelectric plate form at least first and second diaphragms spanning respective cavities in the substrate. A first conductor pattern on the surface of the piezoelectric plate includes a first plurality of contact pads and at least first and second IDTs with interleaved fingers of each IDT on respective diaphragms. An interposer includes a second plurality of contacts pads. A plurality of conductive balls bond each of the contact pads of the first plurality of contact pads to respective contact pads of the second plurality of contact pads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.