Low loss transversely-excited film bulk acoustic resonators and filters
US12040783B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2022 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Sep 29, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/174
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator device includes a diaphragm a diaphragm comprising a portion of a piezoelectric plate spanning a cavity. A conductor pattern on a surface of the piezoelectric plate includes an interdigital transducer (IDT) with a first busbar, a second busbar, and a plurality of interleaved IDT fingers extending alternately from the first and second busbars. Overlapping portions of the plurality of interleaved fingers are on the diaphragm. The conductor pattern also includes a first reflector element on the diaphragm proximate and parallel to a first IDT finger, and a second reflector element on the diaphragm proximate and parallel to a last IDT finger. A center-to-center spacing of the first reflector element and the first IDT finger and the second reflector element and the last IDT finger is greater than an average center-to-center spacing between all adjacent pairs of IDT fingers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.