Mask plate, method for fabricating the same, and mask plate assembly
US12043889B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 12, 2021 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Dec 13, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/38
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present application provides mask plate, fabrication method thereof, and mask plate assembly. The mask plate includes two opening areas being respectively on different sides of mask pattern area along first direction, and two welding areas. One welding area is on a side of one opening area away from the mask pattern area along first direction, and the other welding area is on a side of the other opening area away from mask pattern area along first direction. Evaporation holes are arranged in mask unit, buffer holes are arranged in each opening area, and ratio of maximum dimension of buffer hole in any direction in plane where the mask plate is located to maximum dimension of evaporation hole in the direction is greater than 100. Buffer holes are distributed at equal intervals along a second direction, and second direction is in the plane and is perpendicular to first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.