High-sensitivity flexible three-dimensional force tactile sensor and preparation method thereof

US12044584B2 · kind B2 · utility

Assignee

• Anhui University · CN

Inventors

• Xiaohui Guo · Daguantang, CN
• Zhiliang Chen · Shanghai, CN
• Pengbin Gui · Daguantang, CN
• Siliang Wang · Daguantang, CN
• Wei Zeng · 红钢城街道, CN
• Xingang REN · Hefei, CN
• Lixia Yang · Hefei, CN
• Yaohua Xu · Daguantang, CN
• Zhixiang Haung · Daguantang, CN

Key dates

• Filing date: Dec 31, 2021
• Grant date: Jul 23, 2024
• Expiry date: Dec 5, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L5/165
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A high sensitivity flexible three-dimensional force tactile sensor includes a hemispherical contact, wherein the hemispherical contact includes a tray with a groove on the surface and a hemispherical protrusion arranged in the groove. A flexible inverted cone component connected to the lower surface of the hemispherical contact, wherein a plurality of flexible triangular excitation electrode is arranged on the side surface of the flexible inverted cone component. A flexible common electrode surrounding part of the flexible triangular excitation electrode, wherein a first cavity with an opening is opened inside the flexible common electrode, parts of the flexible triangular excitation electrode and the flexible inverted cone component are arranged in the first cavity of the flexible common electrode. The flexible triangular excitation electrode and the flexible inverted cone component have no contact with the inner wall of the first cavity of the flexible common electrode to form an air cavity.