Miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof
US12044591B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2020 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Oct 19, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/2552
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof. A miniature diaphragm-based fiber-optic tip FP pressure sensor includes an optical fiber, a hollow-core optical fiber, and a pressure sensing diaphragm, wherein the optical fiber and the hollow-core optical fiber have the same diameter, the two are spliced by arc welding; and the pressure sensing diaphragm is bonded to the endface of the hollow-core optical fiber by hydroxide catalysis bonding. The FP pressure sensor can not only realize the all-silica structure of a sensor, but also make the joint of each component free of organic polymer, and has extremely high long-term stability and thermal stability. Meanwhile, by a fabrication method of the miniature diaphragm-based fiber-optic tip FP pressure sensor, the application range and service life of the sensor are increased, and fabrication costs are reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.