Patent · US Active

Positional error compensation in assembly of discrete components by adjustment of optical system characteristics

US12046504B2 · kind B2 · utility

0Cited by

3References

19Claims

0Family size

Assignee

Kulicke & Soffa Netherlands B.V. · NL

Inventors

Matthew R. Semler · Appleton, US
Samuel Brown · South Lyon, US
Rudolphus H. Hoefs · Eindhoven, NL

Key dates

Filing date	Jun 11, 2020
Grant date	Jul 23, 2024
Priority date	—
Expiry date	Feb 1, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH10H20/01
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method includes determining an alignment error between a discrete component of a discrete component assembly mounted in a laser-assisted transfer system and a target position on a target substrate, the discrete component assembly including the discrete component adhered to a support by a dynamic release layer; based on the alignment error, determining a beam offset characteristic; and providing a signal indicative of the beam offset characteristic to an optical element of the laser-assisted transfer system, the optical element being configured to adjust a position of a beam pattern relative to the discrete component according to the beam offset characteristic.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.