MEMS gyroscope
US12050105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2022 |
| Grant date | Jul 30, 2024 |
| Priority date | — |
| Expiry date | Mar 30, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5733
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS gyroscope includes an anchor point, a resonator, and a transducer. The resonator includes eight resonating blocks arranged at equal intervals and a coupling beam connecting each two adjacent resonating blocks. The resonating blocks are connected with the anchor point through anchoring beams. The anchoring beams decouple radial motion and circumferential motion of the resonating blocks. The resonating blocks include first resonating blocks, second resonating blocks, third resonating blocks, and fourth resonating blocks. In a vibration mode, the transducer drives the first and second resonating blocks to vibrate along a first axis and a second axis respectively, so the third and fourth resonating blocks are driven to vibrate along the fourth axis and the third axis respectively. In a detection mode, the transducer detects vibration of the third resonating blocks along the third axis and the vibration of the fourth resonating blocks along the fourth axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.