Patent · US Active

MEMS comprising a movable structural element, and MEMS array

US12054384B2 · kind B2 · utility

0Cited by

7References

36Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Peter Duerr · Tokyo, JP
Andreas Neudert · Dresden, DE

Key dates

Filing date	Nov 17, 2020
Grant date	Aug 6, 2024
Priority date	—
Expiry date	Nov 28, 2042

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2207/053
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A MEMS includes a substrate with a substrate extension that rises above a substrate plane. The MEMS includes a movable structural element, a first spring element that mechanically connects the movable structural element to the substrate extension, and a second spring element that mechanically connects the movable structural element to the substrate extension. The first spring element and the second spring element form a parallelogram guide of the movable structural element in relation to the substrate extension.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.