Apparatus and method for capturing an object surface by electromagnetic radiation

US12055384B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Andreas Betsche · Stephanskirchen, DE
• Dirk Beckmann · Harxheim, DE

Key dates

• Filing date: Jul 17, 2019
• Grant date: Aug 6, 2024
• Expiry date: Jan 18, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01S17/89
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus and method for capturing an object surface by electromagnetic radiation are provided. The apparatus includes a radiation generation device having a beam source and being configured to radiate a first and a second electromagnetic radiation having a first and second wavelength, respectively, onto a measurement point or a region of the object surface without emitting radiation onto the measurement point or onto the region, or without emitting radiation utilized for surface capturing, in a wavelength range between the first and the second wavelengths, a capturing device to capture for the measurement point a first and a second measurement value, the first measurement value being based on reflected radiation having the first wavelength and the second measurement value being based on reflected radiation having the second wavelength, and each of the first and second measurement values representing a distance between the capturing device and the object surface.