Method of reducing false-positive particle counts of an interference particle sensor module

US12055475B2 · kind B2 · utility

Assignees

• Robert Bosch GmbH · DE
• TRUMPF PHOTONIC COMPONENTS GMBH · DE

Inventors

• Hans Spruit · Waalre, NL
• Alexander Marc Van Der Lee · Eindhoven, NL
• Philipp Henning Gerlach · Ulm, DE
• Robert Wolf · Dresden, DE
• Robert Weiss · Reutlingen, DE
• Matthias Falk · Reutlingen, DE

Key dates

• Filing date: Dec 21, 2020
• Grant date: Aug 6, 2024
• Expiry date: Apr 4, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/18302
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method reduces false-positive particle counts detected by an interference particle sensor module, which has a laser and a light detector. The method including: emitting laser light; providing a high-frequency signal during the emission of the laser light, a modulation frequency of the high-frequency signal being between 10-500 MHz; detecting an optical response by the light detector in reaction to the emitted laser light while providing the high-frequency signal, which is arranged such that a detection signal caused by a macroscopic object positioned between a first and second distance is reduced in comparison to a detection signal caused by the macroscopic object at the same position without providing the high-frequency signal. The high-frequency signal is provided to a tuning structure of the particle sensor module which is arranged to modify a resonance frequency of an optical resonator comprised by the laser sensor module upon reception of the high-frequency signal.