MEMS gas sensor and method for manufacturing MEMS gas sensor
US12055507B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2019 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Aug 6, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To extend the life of a MEMS gas sensor, the MEMS gas sensor includes an insulator, a gas sensitive material, a first oxide film and an interlayer insulating film, a heater wiring pattern, a lower protective film, and an upper protective film. The insulator includes a cavity. The gas sensitive material is provided corresponding to the cavity. The first oxide film and the interlayer insulating film are provided on the insulator and arranged to overlap each other in a plan view. The heater wiring pattern serves to heat the gas sensitive material and is disposed between the first oxide film and the interlayer insulating film. The lower protective film and the upper protective film cover, in direct contact, an upper surface, a lower surface, and a side surface of the heater wiring pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.