Two-dimensional photoelectric autocollimation method and device based on wavefront measurement and correction
US12055710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Oct 20, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/30
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The disclosure belongs to the technical field of precision test and measurement, and provides a two-dimensional photoelectric autocollimation method and device based on wavefront measurement and correction. According to the disclosure, a link of wavefront measurement and correction of a reference light path is added to a traditional autocollimator measuring method. By using wavefront distortion information of the reference light path in the instrument and driving a deformable mirror to compensate for phase distortion of a beam, the link realizes measurement and control on aberration of the optical system of the autocollimator and improves the imaging quality and spot positioning accuracy of the optical system, thereby improving the angle measurement accuracy of the autocollimator. At the same time, by introducing the link, the autocollimator has the ability to resist interference from the external environment, so that the resolution and stability of angle measurement of the autocollimator are further improved. The method makes the traditional autocollimator have a nano-radian order (5×10−9 rad, that is 0.001″) angle resolution and a sub-microradian order (10−7 rad, that is 0.02″) a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.