Bulk acoustic resonator
US12057822B2 · kind B2 · utility
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4References
22Claims
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Key dates
| Filing date | May 4, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Mar 5, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/132
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(−0.59*F)] is [[ln{0.008 (μm)2}]/{−0.59*(3.5 GHz)}] or more and [[ln{0.022 (μm)2}]/{−0.59*(3.5 GHz)}] or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.