Transversely-excited film bulk acoustic resonator with concentric interdigitated transducer fingers
US12057823B2 · kind B2 · utility
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82References
16Claims
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Key dates
| Filing date | Dec 15, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Dec 8, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/132
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.