Mask repairing apparatus and mask repairing method using the same
US12058923B2 · kind B2 · utility
1Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Aug 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/861
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.