Manufacturing method of large-outer-diameter quartz crucible for Czochralski (CZ) single crystal
US12060294B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2022 |
| Grant date | Aug 13, 2024 |
| Priority date | — |
| Expiry date | Mar 31, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2201/02
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A manufacturing method of a large-outer-diameter quartz crucible for a Czochralski (CZ) single crystal is provided. The manufacturing method is a vacuum arc method, and specifically includes: releasing a high-temperature arc with an electrode bundle composed of 2N+1 electrodes to fuse a crucible blank, and performing rapid cooling to form an initial quartz crucible product, where N is an integer greater than or equal to 2; the 2N+1 electrodes include one central main electrode and 2N auxiliary electrodes; the 2N auxiliary electrodes are equidistantly distributed on a circumference with the central main electrode as a center; the central main electrode is aligned at an axis of the crucible mold; the 2N auxiliary electrodes are connected to two phases of an industrial three-phase power, and the two phases are alternately arranged on the auxiliary electrodes; the central main electrode is connected to a remaining phase of the industrial three-phase power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.