Patent · US Active

Method for determining the path of a measurement beam of an interferometric measuring device, and measuring device for interferometric measurement of an object under measurement

US12066321B2 · kind B2 · utility

0Cited by

3References

14Claims

0Family size

Assignee

Polytec GmbH · CA

Inventors

Bernd Armbruster · Schenkenzell, DE
Matthias Schussler · Waldbronn, DE
Bernd Heinen · Karlsruhe, DE

Key dates

Filing date	Jun 5, 2019
Grant date	Aug 20, 2024
Priority date	—
Expiry date	Apr 29, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01S17/894
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for determining the path of a measurement beam of an interferometric measuring device, includes A. recording a plurality of spatially resolved images of the object under measurement; B. creating a three-dimensional model of the object under measurement; C. providing a beam-position image-recording unit and recording at least one spatially resolved beam-position-determining image; D. determining the spatial position and orientation of the beam-position image-recording unit relative to the object under measurement; E. providing a spatial relation between the spatial path of the measurement beam of the interferometric measuring device and the position and orientation of the beam-position image-recording unit; F. determining the spatial path of the measurement beam of the interferometric measuring device relative to the object under measurement. A measuring device for interferometric measurement of an object under measurement is also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.