Process for producing a microbolometer comprising a vanadium-oxide-based sensitive material
US12066332B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 27, 2020 |
| Grant date | Aug 20, 2024 |
| Priority date | — |
| Expiry date | Mar 4, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N15/15
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for producing a microbolometer including a vanadium-oxide-based sensitive material containing an additional chemical element chosen from arsenic, germanium, silicon and phosphorus, the process including: determining an effective amount of the additional chemical element from which the modified compound, having undergone a step of exposure to a temperature Tr for a time Δtr, exhibits an electrical resistivity ρa|r at room temperature that is higher than 10% of its native value; producing the sensitive material in a thin layer, this material being formed from the modified compound having an amount of the additional chemical element that is greater than or equal to the effective amount; and exposing the sensitive material to the temperature Tr for the time Δtr.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.