Force measurement system and force measurement method
US12066345B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2021 |
| Grant date | Aug 20, 2024 |
| Priority date | — |
| Expiry date | Jul 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A force measurement system includes: a grinding arm and a force receiving device, the force receiving device being fixed on its one side and configured to receive a force from the grinding arm; a load cell, which is fixed on the force receiving device and configured to detect the force received by the force receiving device; and a grinding disk, which is fixed on the grinding arm that applies the force to the force receiving device through the grinding disk. The embodiments of the present application facilitate accurate acquisition of a force acting upon a grinded object during actual grinding.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.